Demetallisation: an excimer laser is used to produce a sensor device in a matter of seconds. The device is a few tens of square millimetres in area with features down to 5 microns. The process uses synchronised mask scanning where a mask (containing the sensor pattern) is scanned across the laser beam in XY while the sample is simultaneously scanned under the image of the mask produced by a projection lens. The lens demagnifies the mask onto the sample while maintaining the design and producing high resolution micron-size features. This method is very powerful for patterning large areas quickly and with high precision.
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